Room temperature pulsed laser deposited ZnO thin films as photoluminescence gas sensors
D. Padilla, J.M. Vadillo and J.J. Laserna, Applied Surface Science, 2012, 259, 806 – 810
Zinc oxide thin films with optical sensing capabilities for NO2 have been elaborated by pulsed laser deposition (PLD) onto glass substrates at room temperature with Nd:YAG laser (1064 nm). Morphology, chemical composition and optical characteristics of the films were evaluated as a function of laser fluence, gas pressure and target-to-substrate distance. Films exhibit excellent morphological and optical (transmittance and photoluminescence) properties. The films have been evaluated as fluorescence sensors for NO2 in the concentration range between 26 and 200 ppm. Room temperature pulsed laser deposited ZnO thin films as photoluminiscence gas sensor.