Materials analysis using secondary ionization mass spectrometry

Secondary ion mass spectrometry (SIMS) has a lateral resolution in the range of 50-100 microns and roughing rates averaging 2 nm/minute. These capabilities permit performing in-depth intensity profiles with excellent spatial resolution.Thanks to these properties we have addressed satisfactory analysis of technologically advanced materials such as nano-layered structures, triple-junction solar cells and multilayer capacitors.

Análisis de materiales mediante espectrometría de masas de iones secundarios

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